Photolithographic Capability
CTS is capable of single and double side fine line
metallization with excellent metal adhesion to ceramic.
Capabilities include:
| Resolution capability: |
(+/-) 2 microns |
| Registration capability: |
(+/-) 2 microns |
Top to bottom alignment
registration capability: |
(+/-) 2 microns |
| Wafer size capabilities: |
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|
Circular wafers: |
1 to 6 inches in diameter |
|
Rectangular wafers: |
Varied with a maximum of 6 inches x
4 inches |
|
Square wafers: |
1 to 6 inches square |
| Top Contact Metallization: |
Gold on NiChrome |
Critical dimension measurement capability.
Contact us for further details
or inquires.

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