Benefits of CTS'
Ultra-Thin PZT
- Require lower drive voltage for actuation
- Allows for easier integration with silicon wafer
and MEMS technology
- Allows for production processes that utilize and
benefit from silicon wafer processing technology
CTS' Ultra-Thin PZT wafers are available in any CTS
material formulation and can be provided as a bare element
or electroded with a wide variety of sputtered electrodes.
They are available in thicknesses down to 60
microns. CTS can also produce a wide range of surface
finishes compatible with next-level assemblies.
Contact us for further details
or inquiries.
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